Panel‑Level Femtosecond Laser TGV Etching Equipment for Reinforced Glass

設備特性

1. Max. processing area: 730 mm × 920 mm, with flexible compatibility for various substrate sizes.

2. Femtosecond laser enables high‑throughput processing with superior quality.

3. Self-developed processing and control systems.

4. Integrated high‑precision automatic alignment and compensation system.

5. Fully automatic unattended operation.

6. Backed by multiple patents and proprietary core technologies.


應用領域

Mainly used for through‑glass via (TGV) etching of reinforced glass.


OLED與LCD面板產業
半導體產業
Technical Data Sheet

Machine Model

Panel‑Level   Femtosecond Laser TGV Etching Equipment for Reinforced Glass

Max. Processing Size

730x920mm

Hole Position Accuracy

5μm

Travel Speed

≥800mm/s

Hole Roundness (Outer‑hole & Inner‑hole))

≥95% (Major‑axis / Minor‑axis)

Hole‑wall Surface Roughness

≤100nm (Subject to material and   etching capacity)


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